An interference method for measuring parallelism of miniature optical components

Author： Kerobyan Meruzhan   Gyulasaryan Anna   Soghomonyan Suren   Gabrielyan Gevorg   Essaian Stepan  

Publisher： Taylor & Francis Ltd

ISSN： 1362-3044

Source： Journal of Modern Optics, Vol.60, Iss.10, 2013-06, pp. : 808-813

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