Enhanced oxidation of ion-damaged 6H-SiC

Author： Makhtari A.   Raineri V.   Calcagno L.   Via F. La   Frisina F.   Foti G.  

Publisher： Taylor & Francis Ltd

ISSN： 1463-6417

Source： Philosophical Magazine B, Vol.80, Iss.4, 2000-04, pp. : 661-667

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