Analytical model and measurements of the target erosion depth profile of balanced and unbalanced planar magnetron cathodes

Author： Pereira P J S   Escrivão M L   Teixeira M R   Maneira M J P   Nunes Y  

Publisher： IOP Publishing

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.23, Iss.6, 2014-12, pp. : 65031-65042

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