SF6 and C4F8 global kinetic models coupled to sheath models

Author： Haidar Yehya   Pateau Amand   Rhallabi Ahmed   Mokrani Arezki   Taher Fadia   Roqueta Fabrice   Boufnichel Mohamed    

Publisher： IOP Publishing

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.23, Iss.6, 2014-12, pp. : 65037-65051

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