Measurement of cantilever spring constant using an electrostatic sensing and actuating force measurement system

Author: Chen Sheng-Jui   Pan Sheau-Shi   Yeh Yu-Shan   Lin Yi-Ching  

Publisher: IOP Publishing

ISSN: 0957-0233

Source: Measurement Science and Technology, Vol.25, Iss.11, 2014-11, pp. : 115006-115015

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