Characterization of tetragonal distortion in a thick Al0.2Ga0.8N epilayer with an AlN interlayer by Rutherford backscattering/channeling

Author: Huan Wang   Shu-De Yao  

Publisher: IOP Publishing

ISSN: 1674-1056

Source: Chinese Physics B, Vol.23, Iss.9, 2014-09, pp. : 96801-96804

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