CF₄ decomposition in a low-pressure ICP: influence of applied power and O₂ content

Author： Setareh Mahsa Farnia Morteza Maghari Ali Bogaerts Annemie

ISSN： 0022-3727

Source： Journal of Physics D: Applied Physics, Vol.47, Iss.35, 2014-09, pp. : 355205-355219

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