A susceptor with a ∧-shaped slot in a vertical MOCVD reactor by induction heating

Author： Zhiming Li Hailing Li Xiaobing Gan Haiying Jiang Jinping Li Xiaoqian Fu Yanbin Han Yingjie Xia Jianqin Yin Yimei Huang Shigang Hu

Publisher： IOP Publishing

ISSN： 1674-4926

Source： Journal of Semiconductors, Vol.35, Iss.9, 2014-09, pp. : 92003-92007

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