Resolution limit of the white-light interferometric sensor for absolute position measurement based on central fringe maximum identification

Author: Manojlović L M   Živanov M B   Slankamenac M P   Stupar D Z   Bajić J S  

Publisher: IOP Publishing

ISSN: 1402-4896

Source: Physica Scripta, Vol.2014, Iss.162, 2014-09, pp. : 14052-14055

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next