Spot patterns and instabilities in a pulsed low-pressure rf glow discharge

Author： Voronov M Hoffmann V Steingrobe T Buscher W Engelhard C Storey A P Ray S J Hieftje G M

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.23, Iss.5, 2014-10, pp. : 54009-54013

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