Sensitivity enhancement of a microcantilever based DC current sensor by using its torsional modes

Author: Zhang Guiming   Zhao Libo   Jiang Zhuangde   Xu Longqi   Hu Yingjie   Zhao Yulong   Liu Zhigang  

Publisher: IOP Publishing

ISSN: 0957-0233

Source: Measurement Science and Technology, Vol.25, Iss.12, 2014-12, pp. : 125108-125114

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