Application of the digital phase-shifting method in 3D deformation measurement at micro-scale by SEM

Author: Wu Dan   Xie Huimin   Li Chuanwei   Wang Rong  

Publisher: IOP Publishing

ISSN: 0957-0233

Source: Measurement Science and Technology, Vol.25, Iss.12, 2014-12, pp. : 125002-125009

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