Studies of CF2 radical and O atom in oxygen/fluorocarbon plasmas by laser-induced fluorescence

Publisher: IOP Publishing

ISSN: 1468-6996

Source: Science and Technology of Advanced Materials, Vol.2, Iss.3-4, 2001-09, pp. : 113-119

Access to resources Favorite

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract