

Publisher: IOP Publishing
ISSN: 1742-6596
Source: Journal of Physics: Conference Series , Vol.490, Iss.1, 2014-03, pp. : 30-33
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content


A scatterometry inverse problem in optical mask metrology
Journal of Physics: Conference Series , Vol. 135, Iss. 1, 2008-11 ,pp. :


By Shu-Juan Hu Chun-Yu Qiu Li-Yun Zhang Qi-Can Huang Hai-Peng Yu Ji-Fan Chou
Chinese Physics B, Vol. 23, Iss. 8, 2014-08 ,pp. :


An inverse problem approach to optical homodyne tomography
By Tan Sze M.
Journal of Modern Optics, Vol. 44, Iss. 11-12, 1997-11 ,pp. :




Calibration of Johnson’s damage model by a Bayesian approach
EPJ Web of Conference, Vol. 183, Iss. issue, 2018-09 ,pp. :