Publisher： IOP Publishing
ISSN： 1757-899X
Source： IOP Conference Series: Materials Science and Engineering, Vol.15, Iss.1, 2010-11, pp. : 341-344
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Vacancy Species Produced by Rapid Thermal Annealing of Silicon Wafers
Solid State Phenomena, Vol. 2015, Iss. 242, 2016-02 ,pp. :
Access to resources
Recommend
Laser Recovery of Subsurface Damages in Chemomechanically Polished Silicon Wafers
Key Engineering Materials, Vol. 2016, Iss. 701, 2016-08 ,pp. :
Optimizing Conditions for Formation of Local Zones for Thermomigration in Silicon
Solid State Phenomena, Vol. 2017, Iss. 265, 2017-10 ,pp. :
Segregation Gettering Model for Nickel in p/p+ Silicon Wafers
Solid State Phenomena, Vol. 2015, Iss. 242, 2016-02 ,pp. :