Self-limiting nature of atomic layer epitaxy of wurtzite thin films obtained from sequentially pressurized Zn(CH2CH3)2 and H2O vapor pulses on sapphire (001) substrates

Publisher： IOP Publishing

ISSN： 1757-899X

Source： IOP Conference Series: Materials Science and Engineering, Vol.24, Iss.1, 2011-09, pp. : 166-174

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