Epitaxial PZT thin films on YSZ-buffered Si (001) substrates for piezoelectric MEMS or NEMS applications

ISSN： 1757-899X

Source： IOP Conference Series: Materials Science and Engineering, Vol.41, Iss.1, 2012-12, pp. : 67-70

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Multitarget Sputtering of Piezoelectric Mixed Oxide Thin Films onto Flexible Substrates

Solid State Phenomena, Vol. 2015, Iss. 230, 2015-07 ,pp. : 3-6

Trans Tech Publications

Access to resources Recommend Favorite

Ferroelectric and piezoelectric thin films and their applications for integrated capacitors, piezoelectric ultrasound transducers and piezoelectric switches

IOP Conference Series: Materials Science and Engineering, Vol. 8, Iss. 1, 2010-02 ,pp. : 33-44

IOP Publishing

Access to resources Recommend Favorite

Preparation of Fe(Pt,Pd) Alloy Thin Films with Flat Surfaces on MgO(001) Single-Crystal Substrates

Key Engineering Materials, Vol. 2015, Iss. 644, 2015-06 ,pp. : 227-231

Trans Tech Publications

Access to resources Recommend Favorite

Formation and Optical Properties of Thin Mg₂Ge Films on Si(001) Substrate

Solid State Phenomena, Vol. 2016, Iss. 247, 2016-04 ,pp. : 66-72

Trans Tech Publications

Access to resources Recommend Favorite

Growth and dielectric characterisation of large grain BiFeO3 thin films on amorphous SiO2 substrates

IOP Conference Series: Materials Science and Engineering, Vol. 8, Iss. 1, 2010-02 ,pp. : 3-6

IOP Publishing

Access to resources Recommend Favorite