Successive ionic layer deposition: possibilities for gas sensor applications

Publisher： IOP Publishing

ISSN： 1742-6596

Source： Journal of Physics: Conference Series , Vol.15, Iss.1, 2005-01, pp. : 45-50

Access to resources Favorite

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

MOCVD of antimony oxides for gas sensor applications

By  

Le Journal de Physique IV, Vol. 11, Iss. PR3, 2001-08 ,pp. : Pr3-1045-Pr3-1050

Edp Sciences

Access to resources Recommend Favorite

Review on Atomic Layer Deposition and Applications of Oxide Thin Films

By Ponraj Joice Sophia   Attolini Giovanni   Bosi Matteo  

Critical Reviews in Solid State and Material Sciences, Vol. 38, Iss. 3, 2013-01 ,pp. : 203-233

Taylor & Francis Ltd

Access to resources Recommend Favorite

CVD modifications of porous Vycor silica for gas separation and sensor applications

By  

Le Journal de Physique IV, Vol. 11, Iss. PR3, 2001-08 ,pp. : Pr3-1191-Pr3-1196

Edp Sciences

Access to resources Recommend Favorite

Patterning of structures by e-beam lithography and ion etching for gas sensor applications

By  

Journal of Physics: Conference Series , Vol. 514, Iss. 1, 2014-05 ,pp. : 190-194

IOP Publishing

Access to resources Recommend Favorite

Design and Simulation of Electro-fabricated MEMS Microhotplate for Gas Sensor Applications

By  

Journal of Physics: Conference Series , Vol. 34, Iss. 1, 2006-04 ,pp. : 643-649

IOP Publishing

Access to resources Recommend Favorite