Effects of a compliant layer in solid parallel-plate UV-based nanoimprint lithography
Publisher: IOP Publishing
ISSN: 1742-6596
Source: Journal of Physics: Conference Series , Vol.100, Iss.4, 2008-03, pp. : 1-4
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract