High resolution dopant profiling in the SEM, image widths and surface band-bending
Publisher: IOP Publishing
ISSN: 1742-6596
Source: Journal of Physics: Conference Series , Vol.126, Iss.1, 2008-08, pp. : 136-139
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Progress towards quantitative dopant profiling in the SEM
Journal of Physics: Conference Series , Vol. 209, Iss. 1, 2010-02 ,pp. :