Publisher: IOP Publishing
ISSN: 1742-6596
Source: Journal of Physics: Conference Series , Vol.163, Iss.1, 2009-04, pp. : 449-452
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Detailed atomic modeling of Sn plasmas for the EUV source
Journal of Physics: Conference Series , Vol. 112, Iss. 4, 2008-05 ,pp. :
Development of Xe and Sn discharge EUV light source
Journal of Physics: Conference Series , Vol. 112, Iss. 4, 2008-05 ,pp. :
EUV source design flexibility for lithography
Journal of Physics: Conference Series , Vol. 112, Iss. 4, 2008-05 ,pp. :
ATOMIC COLLISIONS IN FUSION PLASMAS
Le Journal de Physique Colloques, Vol. 50, Iss. C1, 1989-01 ,pp. :