Effects of hydrogen addition in nitrogen atmospheric pressure plasma on its optical and electrical properties and silicon-based deposits compositions

Publisher: IOP Publishing

ISSN: 1742-6596

Source: Journal of Physics: Conference Series , Vol.275, Iss.1, 2011-01, pp. : 93-98

Access to resources Favorite

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content