Publisher: IOP Publishing
ISSN: 1742-6596
Source: Journal of Physics: Conference Series , Vol.356, Iss.1, 2012-03, pp. : 145-148
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Study of magnetic field enhanced plasma immersion ion implantation in Silicon
Journal of Physics: Conference Series , Vol. 511, Iss. 1, 2014-05 ,pp. :
Annealing of Si surface region modified by plasma immersion implantation of nitrogen
Journal of Physics: Conference Series , Vol. 356, Iss. 1, 2012-03 ,pp. :