Fabrication and characterization of ZnO/AI/ZnO multilayers by simultaneous DC and RF magnetron sputtering

Publisher: IOP Publishing

ISSN: 1757-899X

Source: IOP Conference Series: Materials Science and Engineering, Vol.73, Iss.1, 2015-02, pp. : 323-325

Access to resources Favorite

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract