Etching of silicon surfaces using atmospheric plasma jets

Author: Paetzelt H   Böhm G   Arnold Th  

Publisher: IOP Publishing

E-ISSN: 1361-6595|24|2|25002-25007

ISSN: 0963-0252

Source: Plasma Sources Science and Technology, Vol.24, Iss.2, 2015-04, pp. : 25002-25007

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Abstract