Fourier analysis of scratches generated on m‐GaN substrates during polishing

Publisher： John Wiley & Sons Inc

E-ISSN： 1521-4079|50|3|263-267

ISSN： 0232-1300

Source： CRYSTAL RESEARCH AND TECHNOLOGY (ELECTRONIC), Vol.50, Iss.3, 2015-03, pp. : 263-267

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