All‐Around SiN Stressor for High and Homogeneous Tensile Strain in Germanium Microdisk Cavities

Publisher： John Wiley & Sons Inc

E-ISSN： 2195-1071|3|3|353-358

ISSN： 2195-1071

Source： ADVANCED OPTICAL MATERIALS (ELECTRONIC), Vol.3, Iss.3, 2015-03, pp. : 353-358

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