Ion‐induced degradation of phase stability and hardness of TiZrSiN nanocomposite thin films

E-ISSN： 1610-1642|12|1‐2|44-48

ISSN： 1862-6351

Source： PHYSICA STATUS SOLIDI (C) - CURRENT TOPICS IN SOLID STATE PHYSICS, Vol.12, Iss.1‐2, 2015-01, pp. : 44-48

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