Thickness and coverage determination of multilayer with an island‐like overlayer by hard X‐ray photoelectron spectroscopy at multiple photon energies

Publisher： John Wiley & Sons Inc

E-ISSN： 1096-9918|47|2|265-269

ISSN： 0142-2421

Source： SURFACE AND INTERFACE ANALYSIS, Vol.47, Iss.2, 2015-02, pp. : 265-269

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