Degradation of the surface passivation of plasma‐assisted ALD Al2O3 under damp‐heat exposure

Publisher: John Wiley & Sons Inc

E-ISSN: 1862-6319|212|2|274-281

ISSN: 1862-6300

Source: PHYSICA STATUS SOLIDI (A) APPLICATIONS AND MATERIALS SCIENCE, Vol.212, Iss.2, 2015-02, pp. : 274-281

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Abstract