Fabrication of Silicon Nanowires Array Using E-beam Lithography Integrated with Microfluidic Channel for pH Sensing

Publisher： Bentham Science Publishers

E-ISSN： 1875-6786|11|2|239-244

ISSN： 1573-4137

Source： Current Nanoscience, Vol.11, Iss.2, 2015-04, pp. : 239-244

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