Effects of the ion-beam voltage on the properties of the diamond-like carbon thin film prepared by ion-beam sputtering deposition

Author: Peng Sun   Ming Hu   Feng Zhang   Yi-Qin Ji   Hua-Song Liu   Dan-Dan Liu   Jian Leng  

Publisher: IOP Publishing

E-ISSN: 1741-4199|24|6|67803-67807

ISSN: 1674-1056

Source: Chinese Physics B, Vol.24, Iss.6, 2015-06, pp. : 67803-67807

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Abstract