Controlling VUV photon fluxes in low-pressure inductively coupled plasmas

Author: Tian Peng   Kushner Mark J  

Publisher: IOP Publishing

E-ISSN: 1361-6595|24|3|34017-34044

ISSN: 0963-0252

Source: Plasma Sources Science and Technology, Vol.24, Iss.3, 2015-06, pp. : 34017-34044

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract