Nanopore arrays in a silicon membrane for parallel single-molecule detection: fabrication

Author: Schmidt Torsten   Zhang Miao   Sychugov Ilya   Roxhed Niclas   Linnros Jan  

Publisher: IOP Publishing

E-ISSN: 1361-6528|26|31|314001-314006

ISSN: 0957-4484

Source: Nanotechnology, Vol.26, Iss.31, 2015-08, pp. : 314001-314006

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