Influence of the incident flux angles on the structures and properties of magnetron sputtered MoS₂ films

Author： Qiao Li Chai Liqiang Zhang Xiaolong Liu Weimin Wang Peng

E-ISSN： 1361-6463|48|17|175304-175311

ISSN： 0022-3727

Source： Journal of Physics D: Applied Physics, Vol.48, Iss.17, 2015-05, pp. : 175304-175311

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