Analysis and verification of the nonlinear error resulting from the misalignment of a polarizing beam splitter in a heterodyne interferometer

Author： Yan Liping   Chen Benyong   Zhang Cen   Zhang Enzheng   Yang Ye  

Publisher： IOP Publishing

E-ISSN： 1361-6501|26|8|85006-85015

ISSN： 0957-0233

Source： Measurement Science and Technology, Vol.26, Iss.8, 2015-08, pp. : 85006-85015

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