Real-time depth monitoring and control of laser machining through scanning beam delivery system

Author: Ji Yang   Grindal Alexander W   Webster Paul J L   Fraser James M  

Publisher: IOP Publishing

E-ISSN: 1361-6463|48|15|155301-155307

ISSN: 0022-3727

Source: Journal of Physics D: Applied Physics, Vol.48, Iss.15, 2015-04, pp. : 155301-155307

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Abstract