On-machine measurement of a slow slide servo diamond-machined 3D microstructure with a curved substrate

Author： Zhu Wu-Le   Yang Shunyao   Ju Bing-Feng   Jiang Jiacheng   Sun Anyu  

Publisher： IOP Publishing

E-ISSN： 1361-6501|26|7|75003-75013

ISSN： 0957-0233

Source： Measurement Science and Technology, Vol.26, Iss.7, 2015-07, pp. : 75003-75013

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