A high performance micro-pressure sensor based on a double-ended quartz tuning fork and silicon diaphragm in atmospheric packaging

Author： Cheng Rongjun Li Cun Zhao Yulong Li Bo Tian Bian

Publisher： IOP Publishing

E-ISSN： 1361-6501|26|6|65101-65108

ISSN： 0957-0233

Source： Measurement Science and Technology, Vol.26, Iss.6, 2015-06, pp. : 65101-65108

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