3D thickness profile measurement of thin films coated on the microscopic area

Author： Joe H-E   Min B-K  

Publisher： IOP Publishing

E-ISSN： 1361-6501|26|6|65602-65607

ISSN： 0957-0233

Source： Measurement Science and Technology, Vol.26, Iss.6, 2015-06, pp. : 65602-65607

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Thin-film thickness profile measurement using a Mirau-type low-coherence interferometer

By Ghim Young-Sik   Yang Ho-Soon   Lee Yun-Woo   Rhee Hyug-Gyo  

Measurement Science and Technology, Vol. 24, Iss. 7, 2013-07 ,pp. : 75002-75008

IOP Publishing

Access to resources Recommend Favorite

THICKNESS DEPENDENCE OF CATHODOLUMINESCENCE IN THIN FILMS

By  

Le Journal de Physique Colloques, Vol. 50, Iss. C6, 1989-06 ,pp. : C6-177-C6-177

Edp Sciences

Access to resources Recommend Favorite

RF critical field measurement of MgB2 thin films coated on Nb

By  

Journal of Physics: Conference Series , Vol. 234, Iss. 1, 2010-06 ,pp. : 284-290

IOP Publishing

Access to resources Recommend Favorite

Measurement of the thickness of thin metallic films with the help of interference fringes of equal chromatic order.

By  

Journal de Physique, Vol. 25, Iss. 12, 1964-12 ,pp. : 1035-1040

Edp Sciences

Access to resources Recommend Favorite

Microscopic Polarization Retention Properties of Ferroelectric Pb(Zr,Ti)O 3 Thin Films

By Song Tae  

Ferroelectrics, Vol. 335, Iss. 1, 2006-01 ,pp. : 61-68

Taylor & Francis Ltd

Access to resources Recommend Favorite