The multi-position calibration of the stiffness for atomic-force microscope cantilevers based on vibration

Author： Zheng Yelong Song Le Hu Gang Cai Xue Liu Hongguang Zhao Meirong Fang Fengzhou Zheng Yelong

E-ISSN： 1361-6501|26|5|55001-55007

ISSN： 0957-0233

Source： Measurement Science and Technology, Vol.26, Iss.5, 2015-05, pp. : 55001-55007

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Abstract

Calibration of the stiffness of atomic force microscope (AFM) cantilevers is critical for industry and academic research. The multi-position calibration method for AFM cantilevers based on vibration is investigated. The position providing minimum uncertainty is deduced. The validity of the multi-position approach is shown via theoretical and experimental means. We applied it to the recently developed vibration method using an AFM cantilever with a normal stiffness of 0.1 N m⁻¹. The standard deviation of the measured stiffness is 0.002 N m⁻¹ with a mean value of 0.189 N m⁻¹ and the relative combined uncertainty is approximately 7%, which is better than the approach using the single position at the tip of the cantilever.