Quantitative Ultrasonic Characterization of c-Axis Oriented Polycrystalline AlN Thin Film for Smart Device Application

Author： Habib A.   Shelke A.   Vogel M.   Brand S.   Jiang Xin   Pietsch U.   Banerjee S.   Kundu T.  

Publisher： S. Hirzel Verlag

E-ISSN： 1861-9959|101|4|675-683

ISSN： 1610-1928

Source： Acta Acustica united with Acustica, Vol.101, Iss.4, 2015-07, pp. : 675-683

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