Nano-Crystalline Diamond Films Grown by Radio-Frequency Inductively Coupled Plasma Jet Enhanced Chemical Vapor Deposition

Publisher： IOP Publishing

E-ISSN： 1741-3540|32|8|88104-88107

ISSN： 0256-307X

Source： Chinese Physics Letters, Vol.32, Iss.8, 2015-01, pp. : 88104-88107

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Abstract

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