Smart Hybrid Polymers for Advanced Damascene Electroplating: Combination of Superfill and Leveling Properties

E-ISSN： 2196-0216|2|8|1096-1099

ISSN： 2196-0216

Source： CHEMELECTROCHEM (ELECTRONIC), Vol.2, Iss.8, 2015-08, pp. : 1096-1099

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