Au‐free Si MOS compatible Ni/Ge/Al ohmic contacts to n+‐InGaAs

Publisher: John Wiley & Sons Inc

E-ISSN: 1862-6319|212|4|804-808

ISSN: 1862-6300

Source: PHYSICA STATUS SOLIDI (A) APPLICATIONS AND MATERIALS SCIENCE, Vol.212, Iss.4, 2015-04, pp. : 804-808

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Abstract