Signal‐to‐noise ratio enhancement on SEM images using a cubic spline interpolation with Savitzky–Golay filters and weighted least squares error

Publisher： John Wiley & Sons Inc

E-ISSN： 1365-2818|258|2|140-150

ISSN： 0022-2720

Source： JOURNAL OF MICROSCOPY, Vol.258, Iss.2, 2015-05, pp. : 140-150

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