Miniaturized Precision Stages with Piezo‐based Inertia Drives

Publisher: John Wiley & Sons Inc

E-ISSN: 1863-9119|12|3|4-39

ISSN: 1613-7728

Source: LASER TECHNIK JOURNAL, Vol.12, Iss.3, 2015-06, pp. : 4-39

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Abstract