3D CFD Simulations: Effect of Operation Parameters on the Deposition of Photocatalytic TiO2 Nanoparticles by MOCVD

E-ISSN： 1521-3862|21|4-5-6|99-110

ISSN： 0948-1907

Source： CHEMICAL VAPOR DEPOSITION (ELECTRONIC), Vol.21, Iss.4-5-6, 2015-06, pp. : 99-110

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