Single‐Step 3D Nanofabrication of Kinoform Optics via Gray‐Scale Focused Ion Beam Lithography for Efficient X‐Ray Focusing

Publisher: John Wiley & Sons Inc

E-ISSN: 2195-1071|3|6|792-800

ISSN: 2195-1071

Source: ADVANCED OPTICAL MATERIALS (ELECTRONIC), Vol.3, Iss.6, 2015-06, pp. : 792-800

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