Chemical bonding structures of silicon oxynitride films grown by ionised N₂ and pure O₂ gas mixtures at low temperature

Author： Yun H-J Lee J Jung M-C Han M-S Park K Ahn K-S Choi C-J

ISSN： 1743-6753

Source： Advances in Applied Ceramics, Vol.110, Iss.1, 2011-01, pp. : 25-29

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